Volume 11, Number 1 (Iranian Journal of Physics Research, Spring 2011)                   IJPR 2011, 11(1): 15-25 | Back to browse issues page


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Sabzalipour A, Mohammadizadeh M. Thickness and roughness measurements of nano thin films by interference. IJPR. 2011; 11 (1) :15-25
URL: http://ijpr.iut.ac.ir/article-1-653-en.html

University of Tehran
Abstract:   (11141 Views)
In the standard optical interference fringes approach, by measuring shift of the interference fringes due to step edge of thin film on substrate, thickness of the layer has already been measured. In order to improve the measurement precision of this popular method, the interference fringes intensity curve was extracted and analyzed before and after the step preparation. By this method, one can measure a few nanometers films thickness. In addition, using the interference fringes intensity curve and its fluctuations, the roughness of surface is measured within a few nanometers accuracy. Comparison of our results with some direct methods of thickness and roughness measurements, i.e. using surface profilemeter and atomic force microscopy confirms the accuracy of the suggested improvements.
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Type of Study: Research | Subject: General

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