The Physics Society of Iran Iranian Journal of Physics Research 1682-6957 25 3 2025 12 22 Utilization of the time-temperature gradient post annealing process for enhancing femtosecond laser induced damage threshold of TiO2 optical films/ verification by XPS study Utilization of the time-temperature gradient post annealing process for enhancing femtosecond laser induced damage threshold of TiO2 optical films/ verification by XPS study 139 142 3676 10.47176/ijpr.25.3.22030 FA Alireza Bananej 1Photonics and quantum technology research school, Nuclear Science and Technology Research Institute 0000-0002-0275-8478 Mahdieh Khatiri Photonics and quantum technology research school, Nuclear Science and Technology Research Institute Hossein Shahrokhabadi 1Photonics and quantum technology research school, Nuclear Science and Technology Research Institute Zohreh Parsa Kharazmi university, Physics Department, Iran Hadi Adelkhani Nuclear fuel cycle research school, Nuclear Science and Technology Research Institute Journal Article 2024 12 29 In this study we have investigated the effect of controlled post annealing process on the optical properties, chemical composition, and theoretical predictions of femtosecond laser induced damage threshold of TiO<sub>2</sub> thin films. It has been shown, by using time temperature gradient annealing process, optical properties of the deposited films can be tailored, and hence, predicted ultra-fast laser induced damage threshold can be enhanced considerably. Also, the above results were in a good agreement with the XPS results of the deposited samples at two distinct annealing processes. In this study we have investigated the effect of controlled post annealing process on the optical properties, chemical composition, and theoretical predictions of femtosecond laser induced damage threshold of TiO<sub>2</sub> thin films. It has been shown, by using time temperature gradient annealing process, optical properties of the deposited films can be tailored, and hence, predicted ultra-fast laser induced damage threshold can be enhanced considerably. Also, the above results were in a good agreement with the XPS results of the deposited samples at two distinct annealing processes. Damage threshold Femtosecond laser annealing Time- temperature gradient Xray photoelectron spectroscopy https://ijpr.iut.ac.ir/article_3676_11338326597d14a1f7c745853f4d50a8.pdf