The Physics Society of Iran Iranian Journal of Physics Research 1682-6957 25 2 2025 09 23 Investigation of stoichiometry effect on structural and electro-optical properties of vanadium oxide thin films deposited by HiPIMS Investigation of stoichiometry effect on structural and electro-optical properties of vanadium oxide thin films deposited by HiPIMS 245 254 3685 10.47176/ijpr.25.2.32067 FA Hamed Najafi Ashtiani Faculty of Basic Sciences, Velayat University, Iranshahr 0000-0002-9977-8474 Adeleh Vatankhahan Faculty of Basic Sciences, Velayat University, Iranshahr Maliheh Azadparvar Faculty of Basic Sciences, Velayat University, Iranshahr Journal Article 2025 03 02 In this study, vanadium oxide thin films were deposited on glass substrates by high-power pulsed magnetron sputtering (HiPIMS) at reactive gas ratios of oxygen to argon of 1, 2.5, 5, 10, 15, 20, 25, and 30% in a 45 µs pulse at an initial deposition chamber pressure of 2×10-7 Torr and a working pressure of 5 mTorr, and were subjected to structural and electro-optical studies. The chemical composition of these metal oxides was determined by X-ray photoelectron spectroscopy (XPS) analysis and they were characterized as VOx with varying x-values. By examining the electro-optical properties, the transparency and optical transmittance of the films, as well as their electrochromic properties, were determined by cyclic voltammetry analysis. It was found that oxygen deficiency in longer pulses causes a decrease in the average optical transmittance and also a decrease in the optical band gap of the films. In this study, vanadium oxide thin films were deposited on glass substrates by high-power pulsed magnetron sputtering (HiPIMS) at reactive gas ratios of oxygen to argon of 1, 2.5, 5, 10, 15, 20, 25, and 30% in a 45 µs pulse at an initial deposition chamber pressure of 2×10-7 Torr and a working pressure of 5 mTorr, and were subjected to structural and electro-optical studies. The chemical composition of these metal oxides was determined by X-ray photoelectron spectroscopy (XPS) analysis and they were characterized as VOx with varying x-values. By examining the electro-optical properties, the transparency and optical transmittance of the films, as well as their electrochromic properties, were determined by cyclic voltammetry analysis. It was found that oxygen deficiency in longer pulses causes a decrease in the average optical transmittance and also a decrease in the optical band gap of the films. https://ijpr.iut.ac.ir/article_3685_55a0df4b5a1786cd13a7a8de759859d4.pdf