Iranian Journal of Physics Research

Study of the effect of temperature on optical and topographical properties of RF ‎Magnetron Sputtered ZrO2 thin films‎

Document Type : Original Article

Authors

R Shakouri 1
E Nahvifard 1
S Miri 2
N Talebani 3

1 Department of Physics, Faculty of science, Imam Khomeini International University, Qazvin‎, Iran

2 Iranian National Center for Laser Science and Technology, Tehran‎, Iran

3 ‎Department of Physics, Faculty of science, Imam Khomeini International University, Qazvin‎, Iran

https://doi.org/10.47176/ijpr.21.2.61073
Abstract
In this paper, ZrO2 thin films were grown on glass substrates using RF magnetic sputtering method. In ‎three separate experiments, three samples of ZrO2 film were prepared at various temperatures. Three ‎temperatures of  25 ̊C (laboratory temperature), 150 ̊C and 250 ̊C were selected for three samples, respectively. Except for temperature, other parameters ‎such as pressure, film growth rate, substrate to target distance and deposition time were the same for all ‎three samples. Optical properties and morphology of the samples were investigated. The morphology of ‎the samples was determined by atomic force microscopy (AFM) images and the ‎transmittance was measured using optical spectroscopy. The optical constants of the films were also ‎calculated using their spectrum. The results show that the effect of temperature is especially evident on ‎the optical properties of the films. As the temperature increases from the ambient temperature to ‎‎250 ̊C, the refractive index changes from n = 2.11 to n = 2.18. Moreover, increasing the ‎temperature, causes the absorption of the layer to increase. The morphology of the films also changes slightly ‎by changing temperature. The average roughness of all three samples is less than half a nanometer.‎.‎‎

Keywords

thin film ZrO2
sputtering
morphology film
optical properties
  1. S Aalaye, et al., IJPR. 12 (2013) 361.

  2. B Mohammadi, et al., IJPR. 16 (2017) 359.

  3. M Mardaani, et al., IJPR. 13 (2013) 197.

  4. J M D Coey, "Magnetism and magnetic materials", Cambridge University Press (2010).

  5. S Hosseini, et al., IJPR. 11 (2011) 181.

  6. R Golipour, et al., IJPR. 7 (2007) 73.

  7. M Irfan, et al., Journal of Alloys and Compounds 691 (2017) 1.

  8. S Yang, et al., Journal of Magnetism and Magnetic Materials 222 (2000) 97.

  9. M Najafi, et al., Journal of science and technology of composite 4 (2017) 255.

  10. A Naeem, et al. Appl. Phys. A. 123 (2017) 1.

  11. M Tian, et al., Appl. Phys. Lett. 83 (2003) 1620.

  12. X Gao, et al., Journal of Catalysis 203 (2001) 18.

  13. G Binnig, et al., Phys. Rev. Lett. 56 (1986) 930.

  14. T M Whiney, et al., Science 261(1993) 1316.

  15. N Ahmad, et al., Journal of Magnetism and Magnetic Materials 441 (2017) 696.



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