Volume 18, Issue 3 ((Iranian Journal of Physics Research,Fall 2018)                   IJPR 2018, 18(3): 427-435 | Back to browse issues page


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Najafi-Ashtiani H. Investigation of pulse width effect on structural and optical properties of molybdenum oxide thin films deposited by HiPIMS. IJPR. 2018; 18 (3) :427-435
URL: http://ijpr.iut.ac.ir/article-1-2543-en.html
Faculty of Basic Sciences, Velayat University, Iranshahr, Iran , h.najafi@velayat.ac.ir
Abstract:   (1320 Views)

In this study, molybdenum oxide thin films are deposited by using high power impulse magnetic sputtering (HiPIMS) at different pulses length of 60, 90, 120, 150 and 180 μs on glass substrates in a combination of reactive and non-reactive gases with a ratio of O2/Ar = 0.66. The structural and optical properties of these coatings are studied. The chemical composition of these metal oxides is determined by analyzing X-ray photoelectron spectroscopy (XPS), and are determined by MoOx stoichiometry with different x-values. By studying the optical properties, it is found that the oxygen deficiency with increasing pulse width cause to reduce the average of optical transmittance and also decrease the optical band gap of coatings.

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Type of Study: Research | Subject: Thin Films

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