In this paper, ZnO thin film was prepared by sol-gel process on glass substrates. The deposited films were dried at 100 and 240 ˚C and then annealed at 300, 400 and 500 ˚C. The two-probe measurement showed that resistance of as-prepared films is very high. The KrF excimer (λ=248 nm) laser irradiation with 1000 pulses, frequency of 1 Hz and 90 mJ/cm2 energy on surface of film resulted in the reduction of the films electrical resistance. X-ray diffraction (XRD) patterns confirmed the improved hexagonal wurtzite structure of film, and AFM and FE-SEM analyses showed regular and spherical grain was formed on the surface. The particle size was increased from ~10 to ~30 nm after leaser irradiation. Generally, it was showed that electrical, structural and morphological properties of films improve considerably by laser irradiation.
Eskandari, F., Ranjbar, M., Kameli, P. & Salamati, H. (2019). The effect of laser irradiation on electrical and structural properties of ZnO thin films. Iranian Journal of Physics Research, 12(4), 323–330.
MLA
Eskandari, F., Ranjbar, M., Kameli, P., & Salamati, H. "The effect of laser irradiation on electrical and structural properties of ZnO thin films", Iranian Journal of Physics Research, 12, 4, 2019, 323–330.
HARVARD
Eskandari, F., Ranjbar, M., Kameli, P., & Salamati, H. (2019). 'The effect of laser irradiation on electrical and structural properties of ZnO thin films', Iranian Journal of Physics Research, 12(4), pp. 323–330.
CHICAGO
Eskandari, F., Ranjbar, M., Kameli, P. & Salamati, H., "The effect of laser irradiation on electrical and structural properties of ZnO thin films." Iranian Journal of Physics Research, 12 4 (2019): 323–330,
VANCOUVER
Eskandari F., Ranjbar M., Kameli P., Salamati H. The effect of laser irradiation on electrical and structural properties of ZnO thin films. Iranian Journal of Physics Research. 2019;12(4):323–330 (In Persian).
