Authors
Abstract
Silver nanoparticles embedded in DLC matrix, were prepared by co-deposition of RF-Sputtering and RF-PECVD method from acetylene gas and sliver target. The RF power and initial pressure of chamber were fixed. Variations of morphology, optical and electrical properties of these films over time were investigated
Keywords
2. J Robertson, Materials Science and Engineering R 37 (2002) 129.
3. T Ghodselahi, M A Vesaghi, A Shafiekhani, A Baradaran, A Karimi, and Z Mobini, Surface and Coating Technology 202 (2008) 2731.
4. M F Al-Kulhaili, J. Phys. D: App. Phys. 40 (2007) 2847.
5. F Qi, Y X Leng, H Sun, and N Huang, IEEE Trans. Plasma Sci. 37 (2009) 1136.
6. Z Zhang and C Noguez, Plasmonics 3 (2008)127.
7. K Lance Kelly, E Coronado, L Zhao, and G C Schatz, J. Phys. Chem. B 107 (2003) 668.
8. F Hong-Liang, G Xiao-Yong, Z Zeng-Yuan, and M Jiao-Min, J. Korean Phys. Soc. 56 (2010) 1176