Authors
Abstract
In this paper a novel optical pressure and acceleration sensor based on micro electro mechanical systems (MEOMS) has been designed. For this purpose an integrated Mach- Zander interferometer has been used in LiNbO3 diaphragm. In this sensor, the strain caused by applied pressure or acceleration leads to a change in refractive index of the wave guide in the diaphragm due to the photoelastic effect. The refractive index change leads to a phase change in the light wave that propagates in the waveguide. This phase change is converted to intensity change using the Mach- Zander interferometer. The software ANSYS 14.5 was used for calculation of the strain in the diaphragm. The pressure and acceleration sensitivity of the designed sensor have been obtained 2.33×10-4 (rad /Pa) and 2.16×10-5 (rad.s2/m), respectively.
Keywords
2. N Maluf, K Williams, “An Introduction to Microelectromechanical Systems Engineering”, Artech House Inc, Boston London (2004).
3. N Di, “Photoelastic and Electro-Optic Effects: Study of PMN-29%PT Single Crystals”, Rochester, New York (2009).
4. C P Fernandes, P O J Glantz, S A Svensson, A Bergmark, Dental Materials 19 (2003) 106.
5. W B Spillman, Opt. Lett. 7 (1982) 388.
6. A Wang, S He, X Fang, X Jin, and J Lin, J. Lightwave Tech. 10 (1992) 1466.
7. H Porte, V Gorel, S Kiryenko, J P Goedgebuer, W Daniau, and P Blind, J. Lightwave Technol. 17 (1999) 229.
8. R Ambrosio, G Lara, A Jimenez, J Mireles, J Ibarra, and A Heredia, “IEEE, International confernce on Simulation oF Semicunductor Processes and Devices”, (2012) 324.
9. P K Pattnaik, A Selvarajan, T Badrinarayana and T Srinivas, “Guided Wave Optical MEMS Pressure Sensors”, Proc. of ISA/IEEE Conference on Sensors for Industry (2005) 122.
10. J Noda, Opt. Comm. 1 (1980) 64.
11. M Valli, A Floretti, and M N Armenise, J. Modern Optics 35 (1988) 885.
12. B E A Saleh and M C Teich, “Fundamentals of Photonics”, John Willey (2006).
13. M Jazbinšek and M Zgonik, Appl. Phys. B 74 (2002) 407.
14. K Iizuka, “Elements of Photonics”, Wiley (2002).
16. R Riveria, G Garcia, J Olivares, M L Crespillo, Journal of Physics Applied Physics D 44 (2011) 11.
17. M Domenjoud, M Lematre, M Gratton, M Lethiecq, and L P Tran-Huu-Hue, IEEE Trans. Ultr. Ferr. Contr. 60 (2013) 2219.
18. K K Wong, “Properties of Lithium Niobate”, INSPEC/Institution of Electrical Engineers (2002).
19. T Dong-Lin, D Bing, H Shan, X Kun-Qing, Z LIANG, and W PENG, Optica Applicata 42 (2012) 121.
)