Investigation of pulse width effect on structural and optical properties of molybdenum oxide thin films deposited by HiPIMS

Najafi-Ashtiani, H

doi:10.29252/ijpr.18.3.427

Investigation of pulse width effect on structural and optical properties of molybdenum oxide thin films deposited by HiPIMS

Author

H Najafi-Ashtiani

https://doi.org/10.29252/ijpr.18.3.427

Abstract

In this study, molybdenum oxide thin films are deposited by using high power impulse magnetic sputtering (HiPIMS) at different pulses length of 60, 90, 120, 150 and 180 μs on glass substrates in a combination of reactive and non-reactive gases with a ratio of O2/Ar = 0.66. The structural and optical properties of these coatings are studied. The chemical composition of these metal oxides is determined by analyzing X-ray photoelectron spectroscopy (XPS), and are determined by MoOx stoichiometry with different x-values. By studying the optical properties, it is found that the oxygen deficiency with increasing pulse width cause to reduce the average of optical transmittance and also decrease the optical band gap of coatings.

Keywords

magnetron sputtering

thin film

molybdenum oxide

Optical properties

1. R Ganesan et al., Journal of Applied Physics 121 (17) (2017).
2. S Rtimi et al., Surface and Coatings Technology 250 (2014) 14.
3. R Ganesan et al., Plasma Sources Science and Technology 24 (2015) 3.
4. A Aijaz et al., Solar Energy Materials and Solar Cells. 149 (2016) 137.
5. S Loquai et al., Solar Energy Materials and Solar Cells. 155 (2016) 60.
6. J Lin et al., Surface and Coatings Technology 204, 14 (2010) 2230.
7. K Sarakinos, J Alami, and S Konstantinidis, Surface and Coatings Technology, 204, 11 (2010) 1661.
8. J Alami et al., Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 23, 2 (2005) 278.
9. A P Ehiasarian, Pure and Applied Chemistry 82, 6 (2010) 1247.
10. E Kusiak-Nejman et al., The Journal of Physical Chemistry C 115, 43 (2011) 21113.
11. M D Tucker et al., Journal of Applied Physics 119, 15 (2016) 155303.
12. M Mickan et al., Solar Energy Materials and Solar Cells 157 (2016) 742.
13. M Aiempanakit et al., Surface and Coatings Technology 205, 20 (2011) 4828.
14. A Belosludtsev et al., Ceramics International, 43, 7 (2017) 5661.
15. S Rtimi et al., Royal Society of Chemistry Advances 3, 32 (2013) 22739.
16. R Ganesan et al., Journal of Physics D: Applied Physics 49, 24 (2016) 245201.
17. T Kubart et al., Plasma Processes and Polymers 4 (S1) 2007 S522.
18. M Hála et al., Journal of Physics D: Applied Physics 45, 5 (2012).
19. O Kamoun et al., Physical study of Eu doped MoO 3 Journal of Alloys and Compounds 687 (2016) 595.
20. B Dasgupta et al., The Journal of Physical Chemistry C: 119, 19 (2015) 10592.
21. W Dong et al., American Chemical Society Appl. Mater. Interfaces 8, 49 (2016) 33842.
22. G H Jung et al., Advanced Energy Materials 1, 6 (2011) 1023.
23. A Hojabri, F Hajakbari, and A E Meibodi, Journal of Theoretical and Applied Physics 9, 1 (2015) 67.
24. J M Pachlhofer et al., Vacuum 13, 1 (2016) 246.
25. P Delporte et al., Catalysis Today 23 (1995) 251.
26. S Y Sun, J L Huang, and D F Lii, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 22, 4 (2004) 1235.