Investigation of stoichiometry effect on structural and electro-optical properties of vanadium oxide thin films deposited by HiPIMS

Najafi Ashtiani, Hamed; Vatankhahan, Adeleh; Azadparvar, Maliheh

doi:10.47176/ijpr.25.2.32067

Investigation of stoichiometry effect on structural and electro-optical properties of vanadium oxide thin films deposited by HiPIMS

Document Type : Original Article

Authors

Hamed Najafi Ashtiani

Adeleh Vatankhahan

Maliheh Azadparvar

Faculty of Basic Sciences, Velayat University, Iranshahr

https://doi.org/10.47176/ijpr.25.2.32067

Abstract

In this study, vanadium oxide thin films were deposited on glass substrates by high-power pulsed magnetron sputtering (HiPIMS) at reactive gas ratios of oxygen to argon of 1, 2.5, 5, 10, 15, 20, 25, and 30% in a 45 µs pulse at an initial deposition chamber pressure of 2×10-7 Torr and a working pressure of 5 mTorr, and were subjected to structural and electro-optical studies. The chemical composition of these metal oxides was determined by X-ray photoelectron spectroscopy (XPS) analysis and they were characterized as VOx with varying x-values. By examining the electro-optical properties, the transparency and optical transmittance of the films, as well as their electrochromic properties, were determined by cyclic voltammetry analysis. It was found that oxygen deficiency in longer pulses causes a decrease in the average optical transmittance and also a decrease in the optical band gap of the films.

Keywords

High power pulse magnetron sputtering

Thin film

Vanadium oxide

Electrochromic

Subjects

Thin Films

H Najafi-Ashtiani, et al., ACS Applied Materials & Interfaces 11 (2019) 14871.
R Ganesan, et al., Journal of Applied Physics 121 (2017) 17.
M Han, et al., Surface and Coatings Technology 405 (2021) 126518.
J Lin, et al., Surface and Coatings Technology 204 (2010) 2230.
R Ganesan, et al., Plasma Sources Science and Technology 24 (2015) 3.
R Ganesan, et al., Surface and Coatings Technology 454 (2023) 129199.
L Qin, et al., Coatings 10 (2020) 11.
H Najafi-Ashtiani, Iranian Journal of Physics Research 18 (2019) 427.
K Sarakinos, et al., Surface and Coatings Technology 204 (2010) 1661.
S Loquai, et al., Solar Energy Materials and Solar Cells 155 (2016) 60.
M D Tucker, et al., Journal of Applied Physics 119 (2016) 15.
M Mickan, et al., Solar Energy Materials and Solar Cells 157 (2016) 742.
M Aiempanakit, et , Surface and Coatings Technology 205 (2011) 4828.
A Belosludtsev, et al., Ceramics International 43 (2017) 5661.
V Tiron, et al., Thin Solid Films 603 (2016) 255.
S Rtimi, et al., RSC Advances 3 (2013) 32.
H Najafi-Ashtiani, et al., Solar Energy Materials and Solar Cells 231 (2021) 111268.
H Najafi-Ashtiani, et al., Journal of Electronic Materials 50 (2021) 2496.
H Najafi-Ashtiani, Journal of Materials Science: Materials in Electronics 30 (2019) 12224.
H Najafi-Ashtiani, et al., Advanced Engineering Materials 26 (2024) 2301378.
P Jin, et al., Ceramics International 42 (2016) 6761.
S Y Lin, et al., Solid State Ionics 212 (2012) 81.
S Touihri, et al., Applied Surface Science 394 (2017) 414.
C Zhang, et al., Applied Surface Science 388 (2016) 82.
G S R Mullapudi, et al., ACS Applied Electronic Materials 1 (2019) 1003.
J Kim, et al., Thin Solid Films 660 (2018) 814.
D Porwal, et al., RSC Advances 5 (2015) 35737.
H Najafi-Ashtiani and A Bahari, Synthetic Metals 217 (2016) 19.
P Hu, et al., Chemival Reviews 123 (2023) 4353.
E Hryha, et al., Surface and interface analysis 44 (2012) 1022.
M Sathiya, et al., Journal of the American Chemical Society 133 (2011) 16291.
F Ure˜na-Begaraa, et al., Applied Surface Science 403 (2017) 717.
H Najafi-Ashtiani, et al., Journal of Materials Science: Materials in Electronics 29 (2018) 5820.