A UHV atomic hydrogen-cracking cell has been constructed to produce atomic hydrogen in order to perform in-situ cleaning of semiconductor samples. The cell was calibrated and tested with the objective of cleaning the III-V semiconductor samples such as GaAs. Mass spectroscopy studies during the atomic hydrogen cleaning of the GaAs samples revealed the chemical process of the hydrogen cleaning. X-ray Photoemission Spectroscopy (XPS) was also carried out on the samples at different stages of cleaning. Desorption of the native oxide from GaAs samples resulted in a smooth surface, which was confirmed by Reflection High Energy Electron Diffraction (RHEED).
Sahra Gard,F. (2019). Construction and testing of a hydrogen cracking cell. Iranian Journal of Physics Research, 11(3), 335-335.
MLA
Sahra Gard,F. . "Construction and testing of a hydrogen cracking cell", Iranian Journal of Physics Research, 11, 3, 2019, 335-335.
HARVARD
Sahra Gard F. (2019). 'Construction and testing of a hydrogen cracking cell', Iranian Journal of Physics Research, 11(3), pp. 335-335.
CHICAGO
F. Sahra Gard, "Construction and testing of a hydrogen cracking cell," Iranian Journal of Physics Research, 11 3 (2019): 335-335,
VANCOUVER
Sahra Gard F. Construction and testing of a hydrogen cracking cell. Dear user; Recently we have changed our software to Sinaweb. If you had already registered with the old site, you may use the same USERNAME but you need to change your password. To do so at the first use, please choose, 2019; 11(3): 335-335.
