Authors
Abstract
Nanostructured TiO2-SnO2 thin-film ethanol sensors have been fabricated on glass substrates using electron beam and sol-gel methods. The surface structure, morphology and optical transmission characteristics of the films were analyzed by X ray diffraction, scanning electron microscopy and UV/VIS/NIR spectrometry. The TiO2-SnO2 films were less than 300 nm thick and consisted of nanocrystallines about 20 nm and 33nm for electron beam and sol-gel methods respectively. The sensing characteristics of TiO2-SnO2 nano structure thin film in electron beam and sol-gel methods, in the flow rate of ethanol at 1800, 2000 and 2400 cc/min at the operating temperature of 200˚C were measured.
Keywords
1. F Edelman, H Hahn, S Seifried, Ch Alof, H Hoche, Materials Science and Engineering B 69 (2000) 386.
2. Ch S Moon, H R Kim, G Auchterloni, J Drenna, J H Lee, Sensors and Actuators B 131 (2008) 556.
3. W Zeng, T Liu, Z Wang, Physica E 43 (2010) 633.
4. V Geraldo, L V A Scalvi, M J Saeki, T J Pereira, C V Santilli, Revista Brasileira de Aplicações de Vácuo 2 ( 2003).
5. Z. M. Shi, L. Yan, Journal of Non-Crystalline Solids 354 (2008) 4654.
6. F. Edelman, H. Hahn, S. Seifried, C. Alof, and et al, Materials Science and Engineering B 69 (2000) 386.
7. Shi Z.M., Yan L., Journal of Non-Crystalline Solids 354 (2008) 4654.
9. M Mehrabian, K Mirabbaszadeh, H Afarideh, Phys. Scr. 88 (2013).
10. J. Tauc, R. Grigorvici, A. Bancu, Phys .Status Solid (1966) 15627.
11. H Ching Lee, W S Hwang, Applied Surface Science 253 (2006) 1889.
12. N Talebian, M R Nilforoushan, Thin Solid Films 518 (2010) 2210.
13. S Ray, P S Gupta, G Singh, Journal of Ovonic Research 6 (2010) 63.
14. S Mahanty, S Roy, S Sen, Journal of Crystal Growth 261 (2004) 77.
15. M H Yeh, W S Hwang, G B Lee, Y M Lu, Materials Transactions 45 (2004) 3318.
16. R J Wu, C Y Chena, M H Chena, Y L Sun, Sensors and Actuators B 123 (2007) 1077.
17. M Parmar, K Rajanna, INTERNATIONAL JOURNAL ON SMART SENSING AND INTELLIGENT SYSTEMS 4 (2011) 710.
18. Z Wen, L Tian mo, Physica B 405 (2010) 1345.
2. Ch S Moon, H R Kim, G Auchterloni, J Drenna, J H Lee, Sensors and Actuators B 131 (2008) 556.
3. W Zeng, T Liu, Z Wang, Physica E 43 (2010) 633.
4. V Geraldo, L V A Scalvi, M J Saeki, T J Pereira, C V Santilli, Revista Brasileira de Aplicações de Vácuo 2 ( 2003).
5. Z. M. Shi, L. Yan, Journal of Non-Crystalline Solids 354 (2008) 4654.
6. F. Edelman, H. Hahn, S. Seifried, C. Alof, and et al, Materials Science and Engineering B 69 (2000) 386.
7. Shi Z.M., Yan L., Journal of Non-Crystalline Solids 354 (2008) 4654.
9. M Mehrabian, K Mirabbaszadeh, H Afarideh, Phys. Scr. 88 (2013).
10. J. Tauc, R. Grigorvici, A. Bancu, Phys .Status Solid (1966) 15627.
11. H Ching Lee, W S Hwang, Applied Surface Science 253 (2006) 1889.
12. N Talebian, M R Nilforoushan, Thin Solid Films 518 (2010) 2210.
13. S Ray, P S Gupta, G Singh, Journal of Ovonic Research 6 (2010) 63.
14. S Mahanty, S Roy, S Sen, Journal of Crystal Growth 261 (2004) 77.
15. M H Yeh, W S Hwang, G B Lee, Y M Lu, Materials Transactions 45 (2004) 3318.
16. R J Wu, C Y Chena, M H Chena, Y L Sun, Sensors and Actuators B 123 (2007) 1077.
17. M Parmar, K Rajanna, INTERNATIONAL JOURNAL ON SMART SENSING AND INTELLIGENT SYSTEMS 4 (2011) 710.
18. Z Wen, L Tian mo, Physica B 405 (2010) 1345.
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