Authors

Abstract

In this paper, plasma main characteristics such as electron mean temperature, electron number density, and oscillation frequency have been measured experimentally using the double Langmuir probe diagnostic system. In our experiment, the plasma was generated by applying the low pressure dc glow discharge in several common gases. The experimental results indicated the highest plasma density and oscillation frequency for the plasma originating from Argon and the highest mean value of temperature for Hydrogen plasma. The experimental results were then confirmed by COMSOL simulator, showing reasonable consistency with the simulations. The data were then used to compare the degree of ionization with the measured plasma parameters.

Keywords

1. B Ghimire et al., Journal of science, Engineering and Technology 10 (2014) 20.
2. A Bogaerts et al., Spectro Chimica Acta, B 57 (2002) 609.
3. J Reece Roth, “Industrial Plasma Engineering”, Institute of Physics Publishing, Bristol and Philadelphia (1995).
4. A Brockhaus et al., Plasma Sources Science and Technology, 3 (1994) 4.
5. E O Johnson and L Malter, Physical Review 80 (1950) 58.
6. L S Pilling et al., Review of Scientific Instruments, 74 (2003) 7.
7. F F Chen, “Electric Probe Plasma Diagnostic Techniques”, Edited by Huddleston and Leonard, Academic Press, New York (1965).
8. S Mijovic et al., Publ. Astron. Obs. Belgrade 84 (2008) 313.
9. D Akbar and S Bilikmen, Chin. Phys. Lett. 23 5 (2006) 1234.
10. A K Shrestha et al., “Double Langmuir Probe for Plasma Parameters Measurement”, Proceedings of the International Conference on Plasma Science and Applications 10, II (2014) 6.
11. J R Patterson et al., “A Langmuir Probe Diagnostic for Use in Inhomogeneous, Time-Varying Plasmas Produced by High-Energy Laser Ablation”, LLNL-CONF-554371, (2012) May 6, 2012 through May 10, (2012).
12. M B Hopkins, J. Res. Natl. Inst. Stand. Technol. 100, 4 (1995) 415.
13. H Jin Yoon et al., Jpn. J. Appl. Phys. 38, 12 (1999) 6890.
14. S S Pradhan, et al., Journal of Physical Sciences 10 (2006) 158.
15. T K Popov et al., Plasma Sources Sci. Technol. 25 (2016) 033001.
16. “COMSOL Multiphysics Reference Guide”, Protected by U.S. Patents (2012), 7, 519, 518; 7, 596, 474; and 7, 623, 991. COMSOL 4.3a.

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